摘要
以 Sn O2 为本底 ,掺杂以 Pd、Sb、Y、Nb等元素并进行外层催化处理 ,催化层由Al2 O3和 Pt组成 ,研制成能够探测 ( 50～ 1 0 0 0 0 )× 1 0 - 6甲烷、抗干扰性非常好的半导体气体传感器 .这种传感器对 C2 H5OH、H2 、CO等气体的灵敏度很低 .在催化层和底层敏感材料之间涂覆一层 Si O2 、α-Al2 O3隔离层 。
Methane gas sensor based on SnO\-2 with high selectivity and sensitivity is fabricated. The sensor has a sensitive part with the materials SnO\-2, Pd, Sb, Y, N\-2O\-5 on the bottom of the sensor and a catalyst layer with the materials Al\-2O\-3/Pt on the surface. The sensor can detect 50-10 000×10\+\{-6\} Methane and has low sensitivity to Ethanol, Hydrogen, Carbon Monoxide. In order to improve Methane sensor stability, SiO\-2 and Al\-2O\-3 inert layer are coated between the sensitive bottom part and the catalyst layer part.
出处
《传感技术学报》
CAS
CSCD
2001年第4期285-291,共7页
Chinese Journal of Sensors and Actuators
