摘要
应小于等于 ０．２５μｍ８英寸 ｆａｂ之需，介绍了实际工程的各项优越水质参数和高可靠、易运作等特点。讨论了水的回收技术、总有机碳（ＴＯＣ）减低技术和安装／配管中的零污染的可能性。
Based on the requirements of 8-inch fabs at 0.25um or below, some parameters of top-level ultrapure water are described, and a ultrapure water system which is highly reliable and easily operated is illustrated. The technologies for the recovery of ultrapure water, reduction of TOC, and contamination-free installation and piping are presented.
出处
《半导体技术》
CAS
CSCD
北大核心
2001年第9期73-76,共4页
Semiconductor Technology
关键词
超纯水
水质
集成电路
ultrapure water
water quality
recovery
total organics carbon
piping
