摘要
介绍了一种在 sol- gel薄膜表面形成光栅结构的方法。用扫描电子显微镜 (SEM)表征了薄膜的表面形貌 ,用原子力显微镜 (AFM)测量了光栅结构的深度。测试了这种结构表面的衍射特性 。
A novel technique is developed to fabricate surface relief gratings using sol gel derived porous coatings on plastic foil substrates The micro structures are investigated using electron scanning microscopy (SEM) AFM photograph gives the depth of the gratings The diffraction properties of the gratings are reseached The +1 diffraction efficiency is found to be increased with the incident angle increasing, but it has a minimum value at 200 ,which is consistent with the calculated results
出处
《光学技术》
CAS
CSCD
2001年第4期324-325,327,共3页
Optical Technique
关键词
sol-gel薄膜
光栅
衍射效率
制备
sol gel coatings
surface relief gratings
diffraction efficiency
