摘要
应用流体润滑理论建立自由悬浮体气膜压力分布模型以及悬浮体非线性运动方程,应用非线性数值求解方法对模型进行求解,获得高频激励下气体挤压膜压力分布、承载能力以及悬浮体悬浮状态参数的瞬态响应。以此为基础分析不同状态下悬浮体的悬浮精度,并讨论其影响因素及规律,发现超声挤压膜支承可以达到很高的支承精度,其影响因素主要为激励频率、激励幅值以及悬浮质量等。在此基础上在悬浮试验台上对悬浮精度进行试验研究,发现数值计算结果和试验数据有较大差异,分析认为造成这一差异的主要原因是测试过程中悬浮盘约束困难,激励信号频率不单一、环境干扰、计算模型不够完善等因素,结论可为超声悬浮轴承或微纳米器件悬浮精度设计提供参考。
The pressure models of squeeze gas film based on hydrodynamic lubricating theory are established,the dynamic equation of freedom levitating object on the squeeze gas film is presented too.And then the non-linear equations are solved by numerical methods,and the pressure distribution and load capacity of squeeze film are obtained.On this basis,a study of levitating precision is performed,the major factors which influence levitating precision are discussed,it is found that the squeeze film levitation could reach high position precision,the main factors influencing the levitation precision include exciting frequency,exciting amplitude and the suspended mass etc.In addition,an experiment about the levitating precision is carried out,it is shown that there exist some differences between the theoretical results and experimental data.The main reasons causing the difference are constraint of the motion in the horizontal plane is difficult,the exciting signals is not single and the theoretical model is not very perfect.The conclusions could be used in the design of near field levitation devices.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2014年第11期186-191,共6页
Journal of Mechanical Engineering
基金
国家自然科学基金资助项目(50975138)
关键词
近场超声悬浮
气体挤压膜
悬浮高度
悬浮精度
near field ultrasonic levitation
gas squeeze film
suspending displacement
levitating precision
