摘要
作为一种常用的等离子体诊断方法,原子发射光谱法具有非侵入、在线诊断、时空分辨等优点,在等离子体诊断领域得到了广泛的应用。作为一种单次脉冲离子源,真空弧离子源具有结构紧凑、工作压强低、束流大和可以随时开始工作等其他类型的离子源所无法比拟的优点,在离子源研究和应用领域受到了极大的关注。为了研究真空弧离子源的放电过程,对其放电生成等离子体的特性进行详细描述,并为进一步的离子源研究和改进奠定基础,采用原子发射光谱法对其放电生成等离子体的参数进行诊断。本文结合原子发射光谱的斯塔克(Stark)展宽和Saha-Boltzmann方程,发展了两种针对光谱仪采集到的发射光谱数据的处理方法,可对等离子体的电子温度、电子密度、离子温度以及热运动状态进行诊断。对阴极为Ti(H)材料时真空弧离子源放电生成的等离子体,分别采用这两种方法对其进行了诊断,对诊断结果的有效性进行了判断。此外,还对光谱采集过程中,实验室背景辐射对诊断结果的影响进行了讨论。
In order to study the discharge process of vacuum arc ion source ,make a detail description of the discharge plasma , and lay the foundation for further research on ion source ,atomic emission spectrometry was used to diagnose the parameters of plasma produced by vaccum arc ion source .In the present paper ,two kinds of analysis method for the emission spectra data col-lected by a spectrometer were developed .Those were based in the stark broadening of spectral lines and Saba-Boltzmann equa-tion .Using those two methods ,the electron temperature ,electron number density and the ion temperature of the plasma can be determined .The emission spectroscopy data used in this paper was collected from the plasma produced by a vacuum arc ion source whose cathode was made by Ti material （which adsorbed hydrogen during storage procedure ） .Both of the two methods were used to diagnose the plasma parameters and judge the thermal motion state of the plasma .Otherwise ,the validity of the di-agnostic results by the two methods were analyzed and compared .In addition ,the affection from laboratory background radiation during the spectral acquisition process was discussed .
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
2014年第3期801-804,共4页
Spectroscopy and Spectral Analysis
