摘要
介绍了两种典型的密封样品的去除吸附氦试验,吸附氦漏率的测试是在Inficon公司Pernicka 700H型积累氦质谱粗漏细漏组合检漏仪上进行的,给出了试验数据、拟合模式和结果,进而分析了最新的美国军用标准MIL-STD-750-1/883J氦质谱检漏方法在降低被检件吸附氦漏率方面的不可检测性,并综合分析了这两项标准的其他问题,提出了全面改进的方案。
Two kinds of typical removing absorbed helium testing for hermetic samples are introduced. The helium leak test is performed with Inficon＇s Pernicka 700H, and the test data, fitting mode and results are given. The undetectability of the helium leak test in the new Mil- Std-750-1/883J in terms of reducing the absorbed helium leak rate of the item-under-test is analyzed. The other problems of the two standards are analyzed, and the solution for improving the testing is presented.
出处
《电子产品可靠性与环境试验》
2013年第6期5-12,共8页
Electronic Product Reliability and Environmental Testing
关键词
氦质谱检漏
去除吸附氦
拟合模式
美军标分析
helium leak
removing absorbed helium
fitting mode
US military standard anal-ysis
