摘要
针对目前多维振动传感器的需求,研制了一种基于MEMS技术的仿昆虫纤毛三维振动传感器。首先,介绍了振动传感器的仿生机理和工作原理;然后,推导了振动传感器的力学模型并建立了有限元模型;最后,对该传感器进行了静、动态特性分析,并通过实验验证最终得出该传感器的灵敏度为274.18μV/gn、维间耦合小于等于0.612 5%、测量范围为±25 gn、共振频率为2 342.6 Hz、抗冲击能力为100 gn。
According to the requirements of multidimensional vibration sensor,a kind of three-dimensional MEMS vibration sensor imitated insects cilium is developed.After discussing the bionic mechanism and the operating principle,the mechanical model and the finite element model of the sensor were established.Combining the analysis of the static and dynamic characteristics of the sensor with experimental verification,the results show that the sensor ＇ s sensitivity is 274.18 μV/gn,and the demensional coupling interference is less then 0.612 5%,and the measurement range is ±25 gn,and the resonance frequency is 0-2 342.6 Hz.Its resistant to impact is 100 gn.
出处
《传感技术学报》
CAS
CSCD
北大核心
2013年第4期502-508,共7页
Chinese Journal of Sensors and Actuators
基金
国家863计划项目(2011AA040404)
国家自然科学基金资助青年科学基金项目(51205374)
国家自然科学基金资助专项基金项目(61127008)
关键词
振动传感器
MEMS
有限元法
三维
仿生
vibration sensor
MEMS
finite element method
three-demension
bionic
