摘要
综述了柔性基底上沉积金属薄膜的制备方法,如化学电镀法、真空蒸镀法、磁控溅射法等,归纳各种方法的优缺点;阐述了柔性基底沉积金属膜的性能研究和应用,并展望其研究前景。
Various preparation methods for metal film deposited on flexible substrate such as chemical plating, vacuum evaporation and magnetron sputtering method, were reviewed. In addition, the virtues and defects of all kinds of preparation methods were summarized. Furthermore, the application and metal film deposited on flexible substrate were presented.
出处
《热加工工艺》
CSCD
北大核心
2013年第8期18-20,23,共4页
Hot Working Technology
基金
上海工程技术大学研究生科研创新项目(2011yjs18)
上海市教委科技发展基金项目(11CXY57)
上海市教委大学生创新实践计划项目(CX1121009)
关键词
柔性基底
金属薄膜
应用
flexible substrate
metal film
application
