摘要
为实现使用Hartmann-Shack(哈特曼-夏克)波前传感器对高分辨率物镜进行高精度检测,提出了使用二维插值多项式替代泽尼克(Zernike)多项式为重构基底对被测波前进行模式重构的方法。为了验证方法的可行性,仿真高分辨率物镜设计波像差为待测波前,得到重构误差均方根(RMS)值为0.0609λ。模拟理想球面波为待测波前,重构精度随拟合阶数增加稳定变化。经过重构正弦波前、余弦波前、非球面波前以及含有低阶球差、彗差、象散、场曲和畸变等像差的一般波前,进一步对比了Zernike多项式和二维插值多项式为基底的重构精度,得到了一种较Zernike多项式拟合精度更高更稳定的模式重构基底。
In order to use Hartmann-Shack wavefront sensor testing lithography objective lens accurately, two- dimension insert polynomial is proposed to replace Zernike polynomial, which is the basic of modal wavefront reconstruction. The wavefront aberration of a lithography lens is simulated to be the under-test wavefront. The root- mean-square （RMS） value of the reconstruction error reaches 0. 0609λ. The possibility of this method is proved. The accurate of reconstruction changes stablely by increase of polynomial fitting orders when the under-test wavefront is ideal spherical wavefront. By reconstructing sine wavefront, cosine wavefront, aspherical wavefront and normal wavefront which contains low order of spherical aberration, coma, astigmatism, field curvature and distortion aberrations, the accuracy of Zernike modal wavefront reconstruction and two-dimension insert modal wavefront reconstruction is compared. A more stable and accurate basic of modal wavefront reconstruction is obtained.
出处
《激光与光电子学进展》
CSCD
北大核心
2012年第12期22-28,共7页
Laser & Optoelectronics Progress
基金
国家杰出青年科学基金(41104122)资助课题
