摘要
文章介绍了退火质子交换机理和制作LiNbO3光波导的工艺过程。
This paper describes the fabrication of LiNbO 3 waveguides by annealing proton exchange(APE) technology.The process and mechanism of APE are also presented.
出处
《半导体光电》
CAS
CSCD
北大核心
2000年第A03期75-77,共3页
Semiconductor Optoelectronics