摘要
研制了一台高频离子源 ,通过实验调试取得了引出电压、聚焦电压及放电气压对引出束流影响的变化曲线 ,从而获得高频离子源的最佳工作条件 。
A RF ion source has been successfully developed for the electrostatic accelerator.Various factors affecting the ion beam,in cluding extraction voltage,focusing voltage and gas pressure,were discussed to optimize the operating performance of the ion source.
出处
《真空科学与技术》
CSCD
北大核心
2000年第3期226-228,共3页
Vacuum Science and Technology
