摘要
Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists of air springs and electro magnetic actuators was presented. The primary function of air springs is to support the turning machine and to isolate the high frequency vibration. The electro magnetic actuators controlled by fuzzy neural networks isolate the low frequency vibration. The experiment indicates that active vibration isolation system isolates base vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10 -6 g and the surface roughness is improved.
Now vibration isolation of ultra-precision machine tool is usually achieved through air-springs systems. As far as HCM-I sub-micro turning machine developed by HIT, an active vibration isolation system that consists of air-springs and electro-magnetic actuators was presented. The primary function of air-springs is to support the turning machine and to isolate the high-frequency vibration. The electro-magnetic actuators controlled by fuzzy-neural networks isolate the low-frequency vibration. The experiment indicates that active vibration isolation system isolates base-vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10-6 g and the surface roughness is improved.
基金
SupportedbyNationalNaturalScienceFoundationofChina
