摘要
设计了一种差动式测振传感器,建立了差动电容式加速度传感器的数学模型,并通过电容的推导计算对其进行了特性分析。对检测电路的结构进行了分析,给出了典型电路结构,推到了电路参数及性能;本设计具有电路结构简单,频率范围宽约0～500Hz,线性度小于1%,灵敏度高,输出稳定,测量误差小等优点;通过实验,各项性能指标满足设计要求。
Designed a inertial vibration sensors.The mathematic model of a differential capacitive acceleration sensor was built up and its characteristic analysis was discussed.The composition of the examinant electric circuit was analyzed.The design has many excellences,such as simple circuit constitution,0~500Hz frequency range,less than 1 percent linearity,high sensitive ability,stability output,little measuring error.Every capability index was examined by experiments and all satisfy the design requirements.
出处
《计算机测量与控制》
CSCD
北大核心
2011年第5期1249-1252,共4页
Computer Measurement &Control
关键词
电容式加速度传感器
差动电容
电路设计
非线性误差
capacitive accelerometer
differential capacitance
electric circuit design
nonlinear error
