摘要
激光位移传感器对位移的测量不仅是非接触式的测量方式,而且具有较高的精度,具有广泛的应用。本文研究了一种利用激光位移传感器测量工件上点的二维坐标,从而实现物体形状的高精度测量。通过一维电位移平台带动激光位移传感器扫描物体的表面,然后对测量的数据进行处理,进而得到物体的表面形貌。实验中采用的位移传感器分辨率为0.3μm,一维电位移平台重复定位精度高于2μm。
Laser displacement sensor displacement measurement is a non-contact measurement with more precision and a wide range of applications.In this paper,a laser displacement sensor measures the workpiece points on twodimensional and achieves the object shape high-precision measurement.Laser displacement sensor is driven to scan surfaces through the one-dimensional electric displacement platform,and then the measurement data is processed,further,the object the surface morphology is recovered according to data process.The displacement sensor resolution is 0.3 μm,one-dimensional electric displacement platform repeated positioning accuracy is high than 2 μm.
出处
《光机电信息》
2010年第10期70-72,共3页
OME Information
基金
文化部科技创新资助项目(27-2009)
吉林省科技厅资助项目(20080339)
关键词
形状测量
激光位移传感器
super-resolution
image processing
maximum a posteriori
