摘要
分析了同步带应用于晶圆传输机器人机械手的误差产生原因,针对晶圆传输机器人高速高精度的定位要求,建立了含有同步带环节的误差模型。对各误差源进行了显著性分析,并在此基础上提出了结合几何误差迭代法和基于运动学逆解的非线性参数辨识的分步标定方法,对模型进行了误差标定及误差补偿。最后经过仿真分析和实验,有效的证明此方法显著地提高了机械手的末端定位精度。
The error causes of the wafer handling robot is analyzed by using timing-belt,and in order to improve positioning precision,the error model including timing-belt is created.On the basis of the prominency of the error＇ analyse,it proposed that an error multiple-step calibration and identification method combining parameter error iteration method with calibration method based on inverse kinematics equation.It also identified the geometrical structure error and the compensation.Last,the simulation and experiment results show that the positioning precision is largely improved after the calibration and compensation.
出处
《机械传动》
CSCD
北大核心
2010年第4期33-37,共5页
Journal of Mechanical Transmission
基金
国家973项目超大规模集成电路制造装备基础问题研究(2009CB724206)
关键词
同步带传动
晶圆传输机器人
显著性分析
运动学标定
误差补偿
Timing-belt transmission Wafer handling robot Prominency analysis Kinematic calibration Error compensation
