摘要
基于微机电系统(Micro-electro-mechanical systems,MEMS)技术,制作了微型气相色谱柱,并对其性能进行了研究。与传统色谱柱相比,此微型色谱柱具有体积小,分析速度快等特点,适用于在线检测分析与监测。本研究利用深刻蚀技术与动态涂覆固定相的方法,设计制作了0.5,1.0及3.0 m色谱柱,实现了对苯,甲苯和邻二甲苯的分离。其中,3.0 m色谱柱对甲苯和邻二甲苯的分离度达14.3,理论板塔数达6160,分离时间少于200 s。考察了柱长对色谱柱分离性能的影响。此微型色谱柱可广泛应用于家居安全,瓦斯监测以及环境检测等领域。
The fabrication and experimental test results were presented for a micro-electro-mechanical systems（MEMS）-based gas chromatography column.Compared with conventional column,this micro-gas chromatography column is suitable for on-line analysis and monitoring because of the small size,rapid analysis and other characteristics.These 0.5,1 and 3 m GC columns were fabricated using a deep reactive-ion etching（DRIE） and were coated the stationary phase via a dynamic coating procedure.These GC columns perfectly separated the mixture of benzene,toluene and o-xylene in less than 200 s,where,the 3.0 m of the GC column achieved a high resolution of 14.3 between toluene and o-xylene and yielded approximately 6160 plates.Moreover,the effect of separation performance for different column length were examined and compared.These GC columns are suitable for the application of a variety of disciplines,including environmental analysis,methane gas probes and homeland security.
出处
《分析化学》
SCIE
EI
CAS
CSCD
北大核心
2010年第2期293-295,共3页
Chinese Journal of Analytical Chemistry
基金
国家自然科学基金(No.60976088)资助项目
关键词
微型色谱柱
分离度
理论板塔数
微机电系统
Micro-gas-chromatography column Resolution Theoretical plate numbers Micro-electro-mechanical systems
