摘要
采用高温熔融–水淬法制备了CaO-B2O3-SiO2系微晶玻璃。通过烧结点实验仪、梯温炉、DTA、XRD对其烧结性能、析晶性能、致密性及介电性能进行了研究。结果表明:可应用于LTCC基板材料的微晶玻璃组成为:x(SiO2)为18.0%、x(CaO)为36.8%、x(B2O3)为45.2%;该微晶玻璃在723℃附近开始软化,771℃析出硼钙石晶体;经850℃烧结1h后得到的微晶玻璃样品具有良好的介电性能(1MHz):εr为4.67,tanδ为0.71×10–3。
CaO-B2O3-SiO2 （CBS） system glass-ceramics were synthesized by high temperature melting and water-quenching methods. Sintering point tester, gradient temperature furnace, DTA and XRD were used to research the sintering properties, crystallization properties, compactness and dielectric properties of CBS system glass-ceramics. Studies show that the composition of CBS glass-ceramic which can be applied to LTCC subatrate materials is as follows： SiO2 18.0%, CaO 36.8%, B2O3 45.2% （mole fraction）; it begins to soften around 723 ℃ and precipitate borocalcite crystals at 771℃; the CBS glass-ceramic sample sintered at 850℃ for 1 h possesses good dielectric properties with relative permittivity of 4.67 and dielectric loss of 0.71×10^-3 at 1 MHz.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2009年第12期12-15,共4页
Electronic Components And Materials
基金
"十一五"装备预研规划子题项目资助(No.51312030301)
