摘要
超光滑抛光玻璃表面粗糙度为纳米量级,超精密抛光加工精度达到分子级或原子级。超光滑和超精密抛光新技术包括数控小工具抛光、应力盘抛光、浴法抛光、磁流变抛光、离子束抛光、电子束抛光、激光抛光和等离子辅助抛光等。本文重点阐述采用20KeV、1×1014. ions/cm2和1×1016. ions/cm2的N+离子对钠钙硅酸盐和铅玻璃进行离子束抛光的原理与工艺,抛光后粗糙度仅为几十纳米。采用高束流脉冲电子束抛光时,当束流超过1012 W/cm2时,玻璃表面Griffith裂纹扩张,粗糙度反而增加,必须严格控制抛光时电子束能量。
The roughness of super-smooth glass surface is in the order of nanometers and the machining precision of super-precision polish is on the molecular or atomic level .The super-smooth and super- precision polishing technology involves numerical control small tool polishing, strain disk polishing, vapor polishing, magneto-rheological polishing , ion beam polishing , electron beam polishing , laser polishing and plasma auxiliary polishing . In this paper the principle and process of ion beam polishing for soda-lime silicate and lead glass surface with N^＋ ion beam of 20KeV, 1× 10^14 ions/cm^2or 1 × 10^14 ions/cm^2 were illustrated in detail, the polished surface roughness is in the order of several tens nanometers. Instead of reducing, the Griffith crack and roughness of glass surface will enlarge as the beam rate above 10^12 W/cm^2 when high speed pulse electron beam was employed , so the flow rate of electron beam must be controlled strictly.
出处
《玻璃》
2009年第10期33-37,共5页
Glass
关键词
超光滑抛光
超精密抛光
玻璃表面
电子束
离子束
super-smooth polishing, super-precision polishing, glass surface, electron beam, ion beam
