摘要
为了提高燃料电池的有效面积比并减少封装用时,采用紫外固化技术成功封装了微型直接甲醇燃料电池.首先基于非硅MEMS工艺制作了带有封装孔的燃料电池集流板,然后组装燃料电池并在封装孔和两集流板间缝隙中注入紫外固化胶,最后用紫外灯照射30s完成封装.实验结果显示,电池在室温、全被动、3mol/L甲醇的条件下,峰值功率密度为2.1mW/cm2,内阻为800mΩ.cm2.这说明紫外固化封装技术对微型直接甲醇燃料电池来说是一种有效的方法,并有望应用于其他MEMS器件的封装.
In order to improve the effective area ratio and decrease packaging time, a micro direct methanol fuel cell （μDMFC） was packaged by ultraviolet （UV） curing technique. First, the current collectors with packaging holes were prepared based on non-silicon MEMS technology. Then the μDMFC was assembled and UV curing resin was injected into the packaging holes and the gap between the two current collectors. Finally, the assembly was exposed under UV light for 30 s and the packaging was completed. Experimeutal results show that this passive μDMFC with 3 mol/L methanol has a maximum power density of 2. 1 mW/cm^2 and an internal ohmic resistance of 800 mΩ · cm^2 at room temperature, which indicates that the UV curing technique is an effective method for the μDMFC packaging and may be feasible for packaging of other MEMS devices.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2009年第4期361-364,共4页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(50805013,50575036)
辽宁省自然科学基金资助项目(20042144)
