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带玻璃衬垫的硅泡沫薄膜压痕理论的近似解析与数值研究

Approximate analytic and numerical study on indentation of cellular/foam film with glass substrate
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摘要 基于弹性和多胞/泡沫固体理论,用近似解析和数值方法研究了带玻璃衬垫的硅多胞/泡沫薄膜压痕问题.研究的重点在于考察接触区的压力分布和压痕临界深度εc,并将计算得到的理论结果与实验结果进行了对比,两者基本一致.为了对这类薄膜结构系统完整性作合理的评估,分析了多胞/泡沫材料变形和破损机理,由此提出了压痕能概念并给出了相应的解析表达式. Approximate analytic and numerical studies on depth-sensing indentation response of ordered cellular/foam materials with glass substrate are carried out based on the elasticity theory and the theory of cellular solids. The observation focuses on the pressure distribution and critical value of indentation depth in the contact zone, which are approximately determined. The theoretical results are compared with the experimental measurements. The comparison shows that they are in good agreement with each other. In order to give a reasonable estimation on the integrality of the film system, the deformation and the failure mechanism are analyzed. And further we observe the indentation energy and derive its analytic expression, whose form is very simple and we suggest that it can be used as a parameter characterizing the indentation response.
出处 《物理学报》 SCIE EI CAS CSCD 北大核心 2009年第F06期189-192,共4页 Acta Physica Sinica
关键词 薄膜 材料试验 固体的力学性质 films, materials testing, mechanical properties of solids
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参考文献16

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