摘要
为了扩大微动工作台的有效行程,提出一种新型的基于Piezo驱动的微步进X-Y工作台,通过机构仿真确定了微步进工作台主框架中各柔性铰链的转角参数,并据此确定了主框架中各柔性铰链的结构参数,最后通过非线性有限元对整个微步进工作台主框架的变形情况进行了分析。
In order to enlarge the effective movement region of micro stepping stage ,a new principle based X-Y micro stage composed of parallel arrangement mechanisms is presented. The motion parameter of large-defarmationflexible hinge is by the motion simulation. According to the nonlinear finite element analysis of large-deformation flexible hinges ,the framework of the X-Y micro stage is designed.
出处
《机械设计与制造》
北大核心
2009年第7期185-187,共3页
Machinery Design & Manufacture
基金
江苏省高校自然科学研究项目(06KJD460004)
关键词
微步进
柔性铰链
设计
Micro stepping
Flexible hinges
Design
