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TEM OBSERVATION OF ION-PLATED Al FILM ON Ni SUBSTRATE

TEM OBSERVATION OF ION-PLATED Al FILM ON Ni SUBSTRATE
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摘要 A new phase was found at the interface between Al film and Ni substrate when the time of ion-plating reaches 5 min.It was identified to be body centered tetragonal lattice with the constants a=b=0.588 nm,c=0.480 nm.The variation of microstructure and phases with the ion-plating time were observed.Based on these results,the ion-plating film formation mech- anism has been also discussed. A new phase was found at the interface between Al film and Ni substrate when the time of ion-plating reaches 5 min.It was identified to be body centered tetragonal lattice with the constants a=b=0.588 nm,c=0.480 nm.The variation of microstructure and phases with the ion-plating time were observed.Based on these results,the ion-plating film formation mech- anism has been also discussed.
出处 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 1989年第3期219-221,共3页 金属学报(英文版)
关键词 magnetron sputtering ion-plating microstrueture plated film magnetron sputtering ion-plating microstrueture plated film
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