摘要
用Ag+离子交换法在掺钕磷酸盐玻璃上制作了光波导。介绍了离子交换的实验过程,并用棱镜耦合法对交换后的基片进行了测试,得到了1到4个模式的平板波导。然后分析了温度、Ag+浓度和交换时间对实验结果的影响,探讨了制作单模和多模波导的工艺条件。最后分析了环境等因素对实验造成的影响,并提出了相应的改善措施,取得了良好的实验效果。
Research on optical waveguide fabricated by Ag^＋ ion exchange method on Nd^3＋- doped phosphate glass is reported. The ion exchange processes are introduced in detail and the waveguide is measured by prism-coupled method. Planar waveguides with one mode to four modes are obtained. Waveguide parameters influenced by the concentration of Ag^＋, exchanged temperature and time are analyzed and summarized. The technical conditions to fabricate singlemode and multimode waveguide are illustrated. Finally, some factors like environment which affect experiment result are analyzed and methods are presented to improve waveguide quality.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2008年第4期544-547,552,共5页
Semiconductor Optoelectronics
关键词
光波导
磷酸盐玻璃
离子交换
钕离子
optical waveguides
phosphate glass ion exchange
Nd^3＋
