摘要
设计了一种新型的差动式压电加速度传感器。介绍了传感器的结构和工作原理,推导了传感器的数学模型,并分析了传感器惯性质量块和压电元件的质量对其输出特性的影响。然后,分析了传感器处理电路的结构,推导了该电路的设计指标。实验结果表明,该传感器采用单个惯性质量块实现了对加速度信号的差动式测量,其结构简单、重量轻、易于加工制造、抗干扰能力强;线性度为0.1%,是普通加速度计的1/2;频率响应误差为1%;重复性为1.27%;测量灵敏度是普通加速度计的2倍,基本达到了设计的目的。
A novel differential piezoelectric acceleration sensor was introduced. The sensor＇s structure and operating principle were presented and its mathematic model was established, then the relation ship between the sensor＇s output characteristic and inertial mass and the piezoelectric components was discussed. Finally,the process circuit structure of sensor and its characteristic were discussed also. Experimental results show that the sensor with one inertial mass can realize the differential measure- ment of acceleration signals, and it has advantages in simple structure, light weight, simple for working and manufacturing, and better anti-interference ability. Its linearity is up to 0.1%, which is half of common accelerometer. It has satisfied the design purpose in frequency response error of 1% and repeatability of 1.27 %, and its measurement sensitivity is twice of general accelerometer.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第6期903-909,共7页
Optics and Precision Engineering
基金
重庆市自然科学基金资助项目(No.8597)
关键词
压电传感器
加速度传感器
差动
piezoelectric
sensor
acceleration sensor
differential
