摘要
介绍了一种比较成熟的矩形微米流道（微槽道）加工工艺，利用厚胶光刻工艺在硅片上制备胶模板，进而在该模板上用高分子聚合物PDMS（Polydimethylsiloxane，聚二甲基硅氧烷）制作了微米量级的微槽道（高、宽范围20～100μm），对制备的微槽道的几何精确度进行了20×100倍放大显微观测，对其流量特性进行了实验测定．实验结果与泊肃叶理论公式（NS方程的管流表达式）相对比，可以看到在微米量级的矩形微流道中，泊肃叶公式仍然适用．
According to the author＇ s experiment practices, this paper gives one kind of mature manufacture methods of making rectangular micro - tubes with PDMS （Polydimethylsiloxane）. The outlets and the inlets for liquid flowing across the rectangular micro - tubes were designed especially after many times of experiments. With the soft lithography technology, a silicon mode plate was made. After this, some rectangular micro - tube structures （with widths and highs of 20- 100μm）were made on the plate surface with PDMS concretion. The geometrical precisions of these micro- tubes were observed with a 20 × 100 microscope, besides that, with given pressures ,fluxes quantities passing through the rectangular micro - tubeswere measured. The results of these experiments were compared with the results of HP （Hagen - Poiseuille） equation which is one simplified shape of NS （Navier- Stokes） equation. In the end, the HP equation was found to be still applicable to rectangular micro- tubes.
出处
《郑州大学学报（工学版）》
CAS
2006年第4期116-120,共5页
Journal of Zhengzhou University（Engineering Science）
基金
中国科学院重大创新基金资助项目(KJCX2-SW-L2)
