摘要
综述了纳机电系统（NEMS）的研究进展；介绍了美国与欧洲在NEMS军用和航空航天领域的研究目标和进展，以及一些典型NEMS器件的应用；讨论了NEMS检测与表征技术以及NEMS制造技术；探讨了NEMS研究发展趋势。
The development of NEMS （nanoelectromechanical system） research is analyzed. Long term program goal and progress of NEMS research for military and aerospace application in United States and Europe are introduced firstly. Some typical applications of NEMS devices are illustrated. Characterization and manufacturing techniques of NEMS are presented then. Finally, the tendency of NEMS research is discussed.
关键词
纳机电系统
纳米技术
航空航天
nanoelectromechanical system
nanotechnology
military and aerospace
