摘要
介绍了一种基于MEMS技术的压电微泵。该微泵利用聚二甲基硅氧烷(PDMS)作为泵膜,使用了一个主动阀和一个被动阀,并利用压电双晶片作为驱动部件。压电双晶片和PDMS泵膜的组合可以产生较大的泵腔体积改变和压缩比,显著降低了加工成本,并提高了成品率。对压电微泵的输出流量进行了测试,结果显示:电压、频率以及背压对流量均有显著影响。在100 V,25Hz的方波驱动下,该压电微泵的最大输出流量为458μL/m in,最大输出压力为6 kPa。
A piezoelectric micropump based on MEMS technology is presented. Polydimethylsiloxane （PDMS） is utilized to form the diaphragm, a passive valve and an active valve are formed by anisotropic etching of bulk silicon, and a piezoelectric bimorph is used as the actuator. The combination of piezoelectric bimorph and PDMS diaphragm can bring large chamber volume change,reduce the manufacture cost and increase the yields. The flow rates of the micropump are measured, and the result shows that the voltage, frequency and the back pressure all have an influence to the flow rates. When a square wave of 100 V and 25 Hz is applied, the flow rate of piezoelectric micropump reaches to 458 μL/min,and a maximum output pressure of 6 kPa is produced.
出处
《传感器与微系统》
CSCD
北大核心
2006年第8期82-84,88,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金重点资助项目(60427001)
国家自然科学基金资助重大项目(20299030)
国家自然科学基金资助项目(60501020)
关键词
微泵
压电双晶片
聚二甲基硅氧烷
复合阀
micropump
piezoelectric bimorph
polydimethylsiloxane（PDMS）
hybrid valve
