摘要
采用直流励磁磁控溅射法制备NdFeB稀土永磁薄膜。研究分析了衬底预热与定向沉积法对薄膜结构和磁性能的影响。实验结果表明:定向沉积技术制备出的NdFeB薄膜表面形成单一方向的柱状晶,该柱状晶生长方向垂直于薄膜表面,使薄膜具有良好的磁各向异性,薄膜矫顽力大大提高,H⊥/H∥比值改善。在预热温度200℃逐渐加热到500℃并保温10min时,薄膜磁性能最佳。
NdFeB thin films were fabricated by magnetron sputtering of direct current excitation in this article. The effects of preheating substrate and oriented deposition on the thin film morphology and the magnetic properties were studied. The experiment results indicated that the NdFeB thin films prepared by orientated deposition and dynamical heating from 200℃ to 500℃ then kept for 10 minutes have columnar crystals perpendicular to films＇ surface in one direction, resulting their anisotropic magnetic property, and higher coercive force and H⊥/H∥.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第7期1109-1112,共4页
Rare Metal Materials and Engineering
基金
江苏省教育厅高校科学研究项目(03KJD430067)
关键词
NdFeB薄膜
定向沉积
动态加热
磁性能
NdFeB film
oriented depositing
dynamic heating
magnetic property
