摘要
本文给出ＭＸ７３０４Ａ单极质谱计在ＨＴ－７装置首次低温超导调试过程中的应用。介绍进行残气质谱分析的目的，方法和采用的差分抽气质谱分析系统；给出装置调试过程中常温和低温状态下残气谱图；根据残气成分的分析和真空测量综合评价装置的真空状况。
The application of MX7304A monopole mass spectrometer is presented in the primary test of superconductor for the Cryostat of HT 7 device in this paper. The aim and the method of mass spectrum analysis for residual gas and the differential pumping system,meanwhile, are introduced. The residual gas spectrum at ambient temperature and low temperature are shown in the process of adjusting the device, and the results can synthetically assess the vacuum status of the device.
出处
《真空》
CAS
北大核心
1996年第5期15-19,共5页
Vacuum
