摘要
化学气相沉积(CVD)金刚石薄膜优异的光学性能在近几年得到了广泛的重视,关于它的研究也在近几年取得了较大的突破。综述了CVD金刚石薄膜的光学性能,着重从成核、生长和后期处理三个方面对光学级CVD金刚石薄膜的制备进行了讨论,并对今后的研究作了展望。
During these years, the excellent properties of chemical vapor deposition（CVD） diamond film have gained widespread research interest, and the studies on their optical applications have made great progress. The optical properties of CVD diamond film are summarized; the three facets of the preparation of optical CVD diamond film, such as nucleation, growth and processing, are discussed; and finally, the foreground of the study on optical diamond film is expected.
出处
《激光与光电子学进展》
CSCD
北大核心
2006年第7期22-26,共5页
Laser & Optoelectronics Progress
基金
湖北省科技攻关计划(2002AA105A02)
湖北省高等学校优秀中青年科技创新团队资助项目。
关键词
金刚石薄膜
化学气相沉积
光学性能
成核
薄膜生长
diamond thin film
chemical vapor deposition
optical property
nucleation
film growth
