摘要
对微热板温度、应力的分布以及功耗等情况的了解有利于微热板的优化设计,从而设计出性能符合要求的表面离化微热板．为此,用有限元方法对膜片型及梁支型微热板的温度和应力分布以及形变进行了模拟分析．结果表明:梁支型微热板不仅温度分布均匀,而且机械稳定性好,但是功耗较大;通过加热面积和梁长等结构尺寸的优化,可以有效降低功耗,同时能满足表面离化源对离化面积的要求．因此,梁支型微热板比膜片型微热板更适用于表面离化．
To optimize the micro-hotplate design, in the consideration of the distribution of its temperature and stress, and power consumption, a micro-hotplate for surface ionization is designed with a satisfying performance. In this paper, two micro-hotplates are analyzed by finite dement method. Compared with membrane-type one, the bridge-type micro-hotplate has not only a uniform temperature distribution, but also a better mechanical stability besides, however, a large power consumption. By increasing heating area and bridge length, its power consumption can be lowered effectively. The result shows that the bridge-type hotplate is more suitable for surface ionization.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2006年第2期136-140,共5页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(60402002)
关键词
有限元方法
微热板
表面离化
finite element method
micro-hotplate
surface ionization
