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HgCdTe晶体上Cd和Te的阴极共沉积 被引量:1

Cathodic Codeposition of Cd and Te on HgCdTe Crystal
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摘要 在HgCdTe晶体表面上用电化学方法得到了Cd和Te的共沉积.所用的电解质由H2SO4;CdSO4和TeO2的水溶液所组成.稳态沉积电流密度随着沉积电位更负,电解质温度升高和TeO2浓度的增加而增大.X光衍射分析证实,当沉积电位比-0.70V(vsSCE)更负时,沉积膜由CdTe和Cd所组成.当沉积电位比-0.675V更正时,沉积膜为化学计量的多晶CdTe,其(111)面为优先生长的晶面族.沉积膜的显微照相可能表明多层CdTe的扁平晶粒逐步长大连成一体后而完全复盖底晶.俄歇电子谱的深度剖面分析显示在所沉积的条件下,底晶中的Hg向CdTe沉积膜内有较深的扩散. Cd and Te codeposition was performed by means of electrochemical technique on HgCdTe crystal. An aqueous electrolyte containing CdSO4 and TeO2 with PH=2 ̄2.5 was used. The deposition current density was increased as the cathodic potential became more negative, and TeOZ concentration and the temperature of the electrolyte were enhanced. It was identified by X-ray diffraction analysis that the deposition film consists of CdTe and Cd when the cathodic potential is more negative than -0.70V(vs SCE). However, it consists only of stoichiometric polycrystalline CdTe when the deposition potential is more positive than -0.675V (vs SCE). The CdTe (111) is the preferencially grown crystal face group. The microphoto of the deposition film revealed that the substrate HgCdTe crystal is covered by multilayers of flat grains which are growing continuously. Auger depth profile of CdTe film showed that Cd and Te have a homogeneous distribution along the depth. However it was observed that Hg from the substrate HgCdTecrystal diffuses into the film to a wide distance.
出处 《无机材料学报》 SCIE EI CAS CSCD 北大核心 1996年第1期131-136,共6页 Journal of Inorganic Materials
关键词 共沉积 HGCDTE 半导体 codeposition HgCdTe CdTe
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