摘要
介绍了激光损伤的检测及损伤阈值的测量方法。讨论激光辐照对类金刚石结构和性质的影响规律。并论述不同工作参数的激光对类金刚石薄膜的激光破坏行为及其损伤阈值。在此基础上分析类金刚石薄膜激光损伤的机理。还从物理特性及制备技术方面着手,比较分析金刚石及类金刚石薄膜各自的优缺点和实际应用状况,并提出类金刚石薄膜的应用前景和有待进一步研究的问题。
The methods of laser damage detection and laser induced damage threshold （LIDT） were introduced. Laser damage behavior and LIDT of diamond-like carbon （DLC） films irradiated under different laser parameters were reviewed. Laser induced damage mechanism and the modification of laser irradiation on the structure and characters of DLC were analysed. The advantage and disadvantage of diamond and DLC in the applications were discussed as viewed from physical characteristics and preparation technology. And the further researches were given.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2006年第4期519-523,共5页
Journal of Functional Materials
基金
国家"十五"科技预研资助项目(41312040401)
国家高技术研究发展计划(863计划)资助项目(2002AA305507)
关键词
类金刚石
激光损伤阈值
激光损伤机理
激光辐照
diamond-like carbon （DLC）
laser induced damage threshold
laser damage mechanism
laser irradiation
