摘要
常用的激光三角法微位移传感器适用于直线位移测量,不适用于微小角位移的动态测量。因此研制了一种新型的基于线阵CCD的微小角位移传感器,采用平行光斜射式激光三角法,由准直透镜、聚焦透镜及光栏等光学器件、高速线阵CCD及由CPLD、信号发生电路和采样保持电路等构成的实时信号处理电路组成,具有结构简单,线性度好,灵敏度高,测量频率高,分辨率高和实时性好等特点;介绍了其结构和工作原理,实验测试其特性,并将其应用于高频电—机械转换器动态特性的测量。研究表明该传感器的最大量程为0.2rad,分辨率为0.0002rad,最高测量频率为10kHz,可应用于高频电—机械转换器等元件的微小角位移的特性的动态检测。
Conventional laser triangle type sensor can only be used to measure linear displacement, but can＇t be used to measure micro angle displacement. This paper puts forward a novel micro-displacement sensor and introduces its working principle and structure, which uses laser triangle method and optical lever principle. The senor consists of He-Ne laser source, optical collimation parts, linear CCD and real signal processing circuit combined wi,th CPLD, SHA, and signal generator, and then the new sensor is put into example to test its characteristics. The sensor is utilized to test dynamic characteristics of a high response electromechanical converter. Experiment results shows that the novel sensor has an advantage of high measure accuracy range of 0.2 tad, good resloution of 0. 0002 tad and high measure frequency 10 kHz, and it can be used in online measurement of the micro angle displacement of high response electromechanical converter or other components. Theoretical analysis supports the experimental results. The sonsor is simple in structure and has good linearity.
出处
《传感技术学报》
EI
CAS
CSCD
北大核心
2006年第1期74-77,共4页
Chinese Journal of Sensors and Actuators
关键词
微位移传感器
线阵CCD
激光三角法
实时信号处理
micro displacement sensor
linear CCD
laser triangle method
real-time signal process
