摘要
提出一种新的微压电泵工作机理,采用环形流道式泵腔与两个无运动件阀,形成双级惯性动量作用机制。通过减小腔内回流比例、增大正反方向流阻差,提高泵液效率与输出泵压、减小输出脉动。仿真结果表明该工作机理是可行的。
A new working principle of micro mechanical pump is proposed. With a round-path chamber and two no-moving-part-valves, this pump takes full advantage of fluid inertia and forms two-stage hydrodynamics mechanism. By reducing the reverse flow in chamber and by increasing resistance difference of back-and-forth flow, higher efficiency, higher pressure and less output fluctuation could be expected. The emulation results prove the feasibility of the principle.
出处
《压电与声光》
CSCD
北大核心
2006年第1期43-45,共3页
Piezoelectrics & Acoustooptics
基金
电子科技大学青年科技基金资助项目
中国科学院微细加工光学技术国家重点实验室开放基金资助项目
关键词
微压电泵
压电陶瓷
微机电系统
micro piezoelectric pump
piezoelectric ceramic
micro electro mechanical system （MEMS）
