摘要
本文介绍了自硅石制备单晶硅的生产链,即电弧炉中还原硅石获得工业硅,用三氯氢硅法或硅烷法制备多晶硅,再用坩埚直拉法或区域熔炼法制备电子工业超纯晶体硅——单晶硅,包括较为详尽的生产方法和工艺流程。
This text introduced the production chain which single crystal silicon is prepared fi-om silica, namely silica is deoxidized as industry silicon in arc furnace, and more crystal silicon is prepared using three chlorine hydrogen siticon method or silicon alkyl method, and then the super pure cry.stal silicon single crystal silicon is prepared using crucible pulling method or zone melting method, thereinto including more details with the production method and technic process.
出处
《中国非金属矿工业导刊》
2005年第6期48-50,共3页
China Non-Metallic Minerals industry
关键词
硅石
单晶硅
多晶硅
制备
silica
singlg crystal silicon
more crystal silicon
preparation
