摘要
介绍一种应用于半导体光刻、微型装配、纳米技术等领域的新型磁悬浮平台——六自由度(6DOF)磁悬浮平台。针对该平台的悬浮部分是一个具有参数摄动、输入耦合的复杂系统,提出一种先在输入解耦基础上,再对系统参数扰动采取H∞鲁棒控制方法,最后实现对位置、摆角的闭环控制,该方法易于工程实现和构成闭环系统。仿真结果表明此控制方案有较好的动态、静态特性及鲁棒性。
A novel magnetic suspension planar stage is presented in this paper. The magnetic suspension planar stage is one micro- electromechanical apparatus, which is widely used in semi-conductor processing, circuit board manufacturing, micro-assembling system, and so on. For the mult-input and parameters perturbation system of suspension, H∞ robust control method is proposed base on input decoupling to restrain parameter perturbation, then the closed loop control of position and angle is realized. This means is easily used in project and closed loop control. The simulation results indicate that the proposed scheme has better dynamic and robust characteristics.
出处
《电工技术学报》
EI
CSCD
北大核心
2005年第11期70-74,共5页
Transactions of China Electrotechnical Society
关键词
6DOF磁悬浮平台
参数摄动
输入解耦
鲁棒控制
6DOF magnetic suspension planar stage, parameter perturbation, input decoupling,robust control
