摘要
本文综述了ＩＴＯ膜透导电玻璃的应用前景，列举了当前国内外市场现状及预测。透明导电玻璃是液晶平板显示器（ＬＣ）的主要材料，ＬＣＤ顺应时代的潮流，作为人机接口产品将获得比半导体产业更大的增长率。日本达到了３８％。９０年代由于信息高速公路和多媒体的发展迎来了ＬＣＤ时代。作者列举了ＩＴＯ膜透明导电玻璃的应用实例和镀膜工艺，以及适用于工业化生产设备。认为，作为批量生产，连续直流磁控溅射是当前理想设备。它可以克服产品质量的不均匀性、不稳定性，可实现自动化生产，而且完全有条件实现设备主机国产化．机械部沈阳真空技术研究所，９３年以来已先后成功的研制了两条生产线，镀出的ＩＴＯ膜透明导电玻璃指标完全达到了国外同类产品水平。
Abstractn this paper,the application prospect of the transparent and conductive glass with ITO film is describedand the present market status and predication at home and abroad are given. This kind of glass is chief material for the plane liquid crystal display (LCD). Following the development current,the increasing rate of LCDwill be more than that of the semiconductor as the interface between person and machine.In Japan,it is upto38K. In 90's,due to the development of optical fiber cable and multi-medium the LCD time is coming.Herethe application examples and coating process for the transparent conducting glass with ITO film are introduced,as well as the equipment for industrial production. So far as a large scale production,the continuousDC magnetron sputtering equipment is a ideal one at present. It may overcome the non-uniformity,instabilityof the product quality,and can operate automatically.There are some conditions to produce the main equipment at home. Since 1993,the two in-line systems are successfully produced in Shenyang Vacuum TechnologyInstitute.And the technical data of this kind of glass is up to that of the similar product abroad
出处
《真空》
CAS
北大核心
1995年第6期1-8,共8页
Vacuum
