摘要
老式真空炉由于采用了油扩散泵和手动控温方式,存在真空系统被油污染和控温精度差的问题,严重影响了真空工艺质量。本文介绍了一种在真空系统和电控加热方面升级的思路和依据,以较少的投入实现了设备的升级。
The oil vapor contamination in the old vacuum furnace was inherited from its oil diffusion pump, and the inaccuracy temperature control of the furnace chamber was resulted from the manual temperature adjust- ment. These problems have severely restricted the development of vacuum technology in our laboratories. By re- placing the oil diffusion pump with a turbo molecular pump and adding an automatic temperature control systems the old furnace has been upgraded. A good result has been achieved with a lower expenditure in this way.
出处
《真空电子技术》
2005年第3期46-48,共3页
Vacuum Electronics
关键词
设备
真空炉
技术升级
设计
<Keyword>Equipment
Vacuum furnace
Technical upgrade
Design
