摘要
对现代超精密加工技术的发展现状、地位以及在相关领域的应用进行了论述。并对超精密加工设备以及误差补 偿技术方面也作了阐述。
Discussed the development,status and application in the correlative field of the modern ultraprecise machining technique under summing up a mass of domestic and foreign data.It has also discussed the machining mechanics and the possible machining equipments and the error compensation technique about the ultraprecise machining technique.
出处
《现代制造工程》
CSCD
2005年第1期121-123,共3页
Modern Manufacturing Engineering
关键词
超精密加工
精度
机床
纳米
Ultraprecise machining Precision Machine tool Nanometer
