摘要
对表面粗糙度的评定参数进行了分析比较,应用Beckmann光散射理论推得同步测定表面粗糙度的振幅信息(轮廓均方根偏差σ)和频率信息(相关长度T)的方法。测得的二维数据能更全面地反映表面粗糙度状况。
The conventional techniques for the measurement of surface roughness obtain the swing information of the surface. But it is not enough to precise evaluate the surface quality. According to the theory of Beckmann's light scattering, the method to measure the swing and frequency information simultaneously is developed, so the surface information completely be can learn.
出处
《科学技术与工程》
2005年第2期110-112,共3页
Science Technology and Engineering
关键词
表面粗糙度
散射
同步测量
surface roughness scattering simultaneous measurement
