期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

S型双声路声表面波质量传感器 被引量：2

S-type Surface Acoustic Wave Mass Sensor
在线阅读 下载PDF
导出
摘要 报道了在128°Y切割X传播方向的LiNbO3基片上设计并研制的中心频率为122MHz的S型双声路质量传感器,它能有效地克服环境温度的影响。阐述了该传感器的器件结构及设计,并采用延迟线振荡的方式对器件的性能进行测试。测试结果表明,该器件相对温度系数良好,仅约为10Hz/°C。器件的质量沉积效应灵敏度约为3.8GHz·cm2/g。 In this paper a new S-type SAW mass sensor with central frequency 122 MHz fabricated on 128°Y cut X LiNbO_3 is reported. This sensor can greatly reduce temperature effects. The configuration and design of the device have been explained. The device has been tested by mode of delay line oscillation. The results show that the S-type mass sensor has a very low relative temperature coefficient ( only about 10 Hz/°C). Mass loading effect sensitivity is about 3.8 GHz·cm^2/g.
作者 章安良 朱大中
机构地区 宁波大学信息学院
出处 《压电与声光》 CAS CSCD 北大核心 2005年第1期7-9,17,共4页 Piezoelectrics & Acoustooptics
基金 国家自然科学基金资助项目(No.69876031) 浙江省自然科学基金资助项目(No.698048)
关键词 声表面波传感器 质量沉积效应 多条耦合器 surface acoustic wave sensor mass loading effect multistrip coupler
分类号 TN722 [电子电信—电路与系统]
  • 相关文献

参考文献11

  • 1邹小红,郭成海,史瑞雪.声表面波气体传感器的设计[J].化学传感器,2000,20(3):6-11. 被引量：5
  • 2NOMURA T, SAITOH A, FURRKAWA S. Multichannel chemical sensor using surface acoustic wave device [C]. IEEE Ultrasonics Symposium, 1997:423-426.
  • 3RBIERE D, DEJOUS C, PISTRE J. Jean-francois lipskier and roger planade,SAW organophosphorus sensors coated with fluoropolyol isomers: role of humidity and temperature on the sensitivity [C]. USA:Florida, International Conference on Solid-State Sensor and Actuator,the 1997:1 331-1 334.
  • 4CARON J J, HASKELL R B, BENOIT P,et al. A surface acoustic wave mercury vapor sensor [J].IEEE Transactions on Ultrasonics, Ferroelectrlcs and Frequency Control,1998:45(5) : 1 393-1 398.
  • 5ANISIMKIN V I, VERONA E. New capabilities for optimizing SAW gas sesnsos [J]. IEEE Transactions on Ultrasonics, Ferroelectrlcs and Frequency Control,2001:48(5): 1 413-1 418.
  • 6HECHNER J, WROBEL T- The influence oI PcCu layer crystalline structure on the parameters oI SAW Gas sensors [C]. European Frequency and Time Forum, 1996 : 370-375.
  • 7WOHLTJEN Hank, ARTHUR W, BARGER Snow Ret al. Ballantine,trace chemical vapor detection using SAW delay line oscillators [J]. IEEE Transactions on Ultrasonics, Ferroelectrlcs and Frequency Control, 1999: 34(2) : 172-178.
  • 8CALIENDO C, DAMICO A, VERARDI Pet al. Surface acoustic wave H2 sensor on silicon substrate [C].USA: Chicago, IEEE Ultrasonics Symposium, 1988..569-573.
  • 9BENDER F, DAHINT R, JOSSE F. Acoustic wave-based sensor using mode conversion in periodic gratings [J]. IEEE Transactions on Ultrasonics, Ferroelectrlcs and Frequency Control, 1999:46 (6) : 1 497-1502.
  • 10CAMPBELL C. Surface acoustic wave devices and their signal processing applications [M] .AcademicPress,1989. 111-117.

共引文献4

同被引文献13

  • 1[1]Fu Q Y,Wolf-Joachim Fischer,Helmut Stab.Simulation of wirelessly passive SAW ID tags/sensors using VHDL-AMS[C].IEEE Ultrasonics Sysmposium,2004:1 541-1 544.
  • 2[2]Li S J,Ma L,Wang D Z.A remmote wireless identifi-cation system based on passive surface acoustic wave devices[C].IEEE Ultrasonics Sysmposium,2005:1 113-1 116.
  • 3[3]Yuriy S Shmaliy.Limiting phase errors of passive wireless SAW sensing with differential measurement[J].IEEE Sensors Journal,2004,4(6):819-827.
  • 4[4]Marshall W Leach,Jr.Controlled-source analogous circuits and SPICE models for piezoelectric transduc-ers[J].IEEE Transactions on Ultrasonics Ferro-electrics and Control,1994,41(1):60-66.
  • 5[5]Alf Puttmer,Peter Hauptmann,Ralf Lucklum.SPICE model for lossy piezoceramic transcucers[J].IEEE Transactions on Ultrasonics Ferroelectrics and Con-trol,1997,44(l):60-66.
  • 6[8]John D Ryder.Networks,Line and Fields[M].Prentice-hall,INC (second edition),1964:80-88.
  • 7REBEIZ G M. RF MEMS,theory,design,and technology[M].NewJersey:John Wiley & Sons,2003.1-3.
  • 8THIELE J A,Pereira da Cunha M. High temperature LGS SAW gas sensor[J].Sensors and Actuators B:Chemical,2006,(04):816-822.
  • 9WANGW S,WU T T,CHOU T H. A ZnO nanorod-based SAW oscillatorsystem for ultraviolet detection[J].Nanotechnology,2009,(13):135-138.
  • 10CHUNG G S,PHAN D T. Finite element modeling of surface acoustic waves in piezoelectric thin films[J].Journal of the Korean Physical Society,2010,(03):446-450.

引证文献2

二级引证文献5

压电与声光
2005年 第1期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部