摘要
通过对基底与膜层、膜层之间界面处非均匀性对增透膜增透性能影响的讨论,得到以下结论:在沉积初期,由于基底表面特性和沉积参数的波动,从而在基底与膜层之间产生过渡层,使增透性能减弱,对增透膜的增透效果影响较大;在膜层之间的过渡层,正余弦过渡使增透性能变强,双曲、指数使增透性能减弱,但影响较小,线性渐变基本没有影响。实验镀制了增透膜并对其进行拟合分析,发现基底与膜层以及膜层之间的过渡层按正余弦变化时与实验结果比较吻合,并给予了解释。
Influence of inhomogeneous transitional layers on the spectral characteristics of AR coatings is discussed. The following results are gotten: In the initial stages of deposition, for the surface characteristics of substrate and the perturbations of the deposition parameters, there are transitional layers between substrate and coatings, and anti-reflection decreases; but to the transitional layers between two coatings, sine change will increase the anti-reflection, linear, hyperbolic and exponential will decrease the anti-reflection, and its influence is small. The experimental AR coatings are simulated, and the sine transitional layers are discovered between substrate and coatings are tallied well.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2005年第1期107-109,113,共4页
Optical Technique
关键词
非均匀性
增透膜
拟合
inhomogeneity
AR coatings
simulate
