摘要
微机电系统是在微电子技术基础上产生和发展起来的多学科交叉的前沿科学研究领域 ,是面向 2 1世纪的高新科技 .介绍了微机电系统产生的背景影响、组成特征和基础研究内容 ,综述了微机电系统技术基础所涉及的材料、微机械设计和模、微细加工技术以及微封装与测试等领域 ,并对微机电系统的应用、典型的微器件、国内外的发展现状及前景进行全面分析 .在此基础上 。
Micro-Electro-Mechanical System(MEMS) developes on the basis of microelectronics.It is a scientific researches frontier of multi-disciplines and a high technology in the 21st century.This paper presents the background,characteristics and basic research.The principal techniques of MEMS such as material,design and simulation,micromachining,packaging and testing are reviewed,Typic microapparatus,application prospect and the state-of-art of MEMS are also discussed in this paper.Furthermore,some points of view of developing on MEMS in the future are put forward.
出处
《纳米技术与精密工程》
CAS
CSCD
2004年第2期117-123,共7页
Nanotechnology and Precision Engineering
关键词
微机电系统
微加工技术
微型传感器
微电子技术
半导体材料加工
micro-electro-mechanical system
basic research
micromachining
microsensor
state-of art and prospect
