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微执行器驱动机理研究 被引量：2

Research on the Principle of Micro Actuators
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摘要 微电子机械系统 (MEMS)技术在未来的发展有着重要的意义 ,文章介绍了MEMS微致动器和各类驱动模式的优缺点 ,并以微电动机为例 。 There are important significance of the technology of microelectro mechanical systems(MEMS) in the future development.The characteristic of MEMS micro actuators and all kinds of activate pattern are introduced in this paper.Take micro motor for example,execution mechanism and principle of micro actuators are compared in detail.
作者 谌贵辉 张万里 彭斌 蒋洪川
机构地区 西昌学院 电子科技大学
出处 《微特电机》 北大核心 2004年第7期36-38,共3页 Small & Special Electrical Machines
基金 微细加工光学技术国家重点实验室研究基金资助
关键词 MEMS 致动器 微电动机 MEMS micro actuators micro motor
分类号 TM38 [电气工程—电机]
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参考文献15

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二级参考文献4

共引文献26

同被引文献26

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引证文献2

二级引证文献5

微特电机
2004年 第7期

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