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Sol-gel制备SiO_2增透膜的研究 被引量:14

Study on the SiO_2 antireflective coatings prepared from sol-gel process
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摘要  以正硅酸乙酯(TEOS)为原料,利用溶胶 凝胶法在碱催化下制备二氧化硅增透膜,详细研究了水解条件、溶胶陈化时间对膜层性能的影响。结果表明氨用量的增加对膜层的峰值透光率及峰值增透波长影响不大,但缩短了溶胶达到最佳涂膜效果的陈化时间,当NH3/TEOS摩尔比为0.9~1.05时,溶胶陈放一周内涂膜效果最佳。研究还发现溶胶折光指数最小时,涂膜后膜层增透效果最好,峰值透光率约98%,并可据此确定溶胶最佳涂膜时间。 SiO2 antireflective coatings were dip-coated by sol-gel method with TEOS as precursor and ammonia as catalyst. The influence of hydrolysis condition and ageing time on the performance of the SiO2 coating was studied in detail. It's found that the peak value of transmission spectrum and antireflective wavelength was impervious to the increase of the NH3/TEOS molar ratio, whereas its optimal time for coating was shortened; when the NH3/TEOS molar ratio is between 0.9 and 1.05, the optimal time was less than a week. It s also found that the antireflective effect of the film was optimal while the reflective index of the sol is lowest, and the peak transmission of coatings are about 98%.
出处 《功能材料》 EI CAS CSCD 北大核心 2004年第4期485-486,共2页 Journal of Functional Materials
关键词 溶胶-凝胶 增透膜 陈化时间 折光指数 Aging of materials Ammonia Catalysts Hydrolysis Light transmission Silica Sol gels
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