期刊文献+

Langmuir探针测量低温等离子体参数特性实验 被引量:2

Experimental Teaching of Diagnosis of Low-Temperature Plasma by Single Langmuir Probe
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摘要 介绍了Langmuir探针测量等离子体参数特性的实验原理和方法,采用Langmuir单探针诊断了电子回旋共振等离子体参数的分布特性。结果表明,在一定微波功率下,气压增加,等离子体密度趋于饱和。将Langmuir单探针测量等离子体特性实验引入高年级近代物理实验课程的综合创新实验,使得学生在动手实验的过程中接触到物理学科研究前沿领域的技术与知识,激发学生的创新意识和提高创新能力。 The experimental principle and method of Langmuir probe measurement of plasma characteristic parameters were introduced.As an example,a single Langmuir probe was used to diagnose the distribution characteristics of elec-tron cyclotron resonance plasma.The results show that plasma density tends to be saturated at a certain microwave power when gas pressure increases.In order to arouse the students’creative ideas and interests,it is proposed that providing the experiment on the measurement of characteristic p...
出处 《实验室研究与探索》 CAS 北大核心 2010年第3期4-6,13,共4页 Research and Exploration In Laboratory
基金 国家自然科学基金资助项目(10575039) 教育部高校博士点专项科研资助项目(20040574008) 广东省自然科学基金重点项目(05100534)
关键词 Langmuir单探针 低温等离子体 特性诊断 Langmuir probe low-temperature plasma diagnosis
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参考文献5

  • 1符斯列,陈俊芳,吴先球,赵文峰,樊双莉,马涛.等离子体参数诊断及其特性研究[J].华南师范大学学报(自然科学版),2004,36(2):77-81. 被引量:14
  • 2Fujiwara N,,Sawai H,Yoneda M,et al.Determination of the EEDFby Langmuir probe diagnostics in a plasma excited at ECR above amultipolar magnetic field. Plasma Sources Science Technology . 2001
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二级参考文献11

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