摘要
提出了一种基于双光栅尺的高速高精度位移测量方法。在分析光栅尺测量原理的基础上,探讨双光栅尺信号的切换合成;通过对莫尔条纹电子细分计数脉冲切换误差的分析,研究减小切换合成误差的方法;采用可编程逻辑器件FP-GA设计信号处理电路,并通过逻辑、时序仿真,验证了本方法的可行性。实验结果表明:此方法在光栅尺移动速度>1m/s时,具有10 nm分辨率,可满足新一代运动定位系统对高速高精度位移测量的要求。
A high speed and high precision displacement measurement method based on double grating scales was presented,and the signal's switching and merge of double grating scales was discussed based on the analysis of measuring theory of grating scale.By analysis of the subdivision error of Moire fringe,the error of the count impulse's switch process was decreased.A signal process circuit was designed using the programmable logic device-FPGA,and the feasibility of method was proved through the logical and timing simulation by the design software of FPGA.Experimental results show that while the maximum allowable moving speed of grating is grater than 1 m/s,the measurement resolution is 10 nm.It can satisfy the system requirements of high speed and high precision displacement measurement.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第7期1077-1083,共7页
Optics and Precision Engineering
基金
国家"973"计划资助项目(No.2003CB716202)
黑龙江省科技攻关计划资助项目(No.GC05A509)
关键词
位移测量
双光栅尺
切换合成
FPGA
displacement measurement
double grating scale
switching and merging
FPGA
