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Observation of the Emission Spectra of an Atmospheric Pressure Radio-frequency Plasma Jet
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作者 王百荣 朱文超 蒲以康 《Plasma Science and Technology》 SCIE EI CAS CSCD 2005年第5期3045-3047,共3页
An atmospheric pressure plasma jet (APPJ) using radio-frequency (13.56 MHz) power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the ex... An atmospheric pressure plasma jet (APPJ) using radio-frequency (13.56 MHz) power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the excited species (atomic helium, atomic oxygen and metastable oxygen) generated in this APPJ and their dependence on gas composition ratio and RF power. O and O2(b1∑g^+) are found in the effluent outside the jet by measuring the emission spectra of effluent perpendicular to the jet. An interesting phenomenon is found that there is an abnormal increase of O emission intensity (777.4 nm) between 10 mm and 40 mm away from the nozzle. This observation result is very helpful in practical operation. 展开更多
关键词 low temperature plasma atmospheric pressure plasma jet optical emissionspectroscopy
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