Electrostatic motors have traditionally required high voltage and provided low torque, leaving them with a vanishingly small portion of the motor application space. The lack of robust electrostatic motors is of partic...Electrostatic motors have traditionally required high voltage and provided low torque, leaving them with a vanishingly small portion of the motor application space. The lack of robust electrostatic motors is of particular concern in microsystems because inductive motors do not scale well to small dimensions. Often, microsystem designers have to choose from a host of imperfect actuation solutions, leading to high voltage requirements or low efficiency and thus straining the power budget of the entire system. In this work, we describe a scalable three-dimensional actuator technology that is based on the stacking of thin microhydraulic layers. This technology offers an actuation solution at 50 volts, with high force, high efficiency, fine stepping precision, layering, low abrasion, and resistance to pull-in instability. Actuator layers can also be stacked in different configurations trading off speed for force, and the actuator improves quadratically in power density when its internal dimensions are scaled-down.展开更多
We introduce a new type of actuator,the microhydraulic stepping actuator(MSA),which borrows design and operational concepts from biological muscle and stepper motors.MSAs offer a unique combination of power,efficiency...We introduce a new type of actuator,the microhydraulic stepping actuator(MSA),which borrows design and operational concepts from biological muscle and stepper motors.MSAs offer a unique combination of power,efficiency,and scalability not easily achievable on the microscale.The actuator works by integrating surface tension forces produced by electrowetting acting on scaled droplets along the length of a thin ribbon.Like muscle,MSAs have liquid and solid functional components and can displace a large fraction of their length.The 100μm pitch MSA presented here already has an output power density of over 200 W kg^(−1),rivaling the most powerful biological muscles,due to the scaling of surface tension forces,MSA’s power density grows quadratically as its dimensions are reduced.展开更多
基金We thank Prof.Sangbae Kim for his insights into robotic applications of microhydraulics.We also thank Dr.Shaun Berry and Dr.Mordechai Rothschild for helpful discussions and the Microelectronics Laboratory engineering and operation staff for their invaluable assistance during process development and fabrication.This material is based upon work supported by the Under Secretary of Defense for Research and Engineering and Defense Advanced Research Projects Agency under Air Force Contract No.FA8702-15-D-0001.Any opinions,findings,conclusions,or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the Under Secretary of Defense for Research and Engineering and Defense Advanced Research Projects Agency.
文摘Electrostatic motors have traditionally required high voltage and provided low torque, leaving them with a vanishingly small portion of the motor application space. The lack of robust electrostatic motors is of particular concern in microsystems because inductive motors do not scale well to small dimensions. Often, microsystem designers have to choose from a host of imperfect actuation solutions, leading to high voltage requirements or low efficiency and thus straining the power budget of the entire system. In this work, we describe a scalable three-dimensional actuator technology that is based on the stacking of thin microhydraulic layers. This technology offers an actuation solution at 50 volts, with high force, high efficiency, fine stepping precision, layering, low abrasion, and resistance to pull-in instability. Actuator layers can also be stacked in different configurations trading off speed for force, and the actuator improves quadratically in power density when its internal dimensions are scaled-down.
基金This material is based upon work supported by the Assistant Secretary of Defense for Research and Engineering under Air Force Contract No.FA8721-05-C-0002 and/or FA8702-15-D-0001.
文摘We introduce a new type of actuator,the microhydraulic stepping actuator(MSA),which borrows design and operational concepts from biological muscle and stepper motors.MSAs offer a unique combination of power,efficiency,and scalability not easily achievable on the microscale.The actuator works by integrating surface tension forces produced by electrowetting acting on scaled droplets along the length of a thin ribbon.Like muscle,MSAs have liquid and solid functional components and can displace a large fraction of their length.The 100μm pitch MSA presented here already has an output power density of over 200 W kg^(−1),rivaling the most powerful biological muscles,due to the scaling of surface tension forces,MSA’s power density grows quadratically as its dimensions are reduced.
